HSDS series grinding fluid supply system adopts modular design, customization, flexible configuration, online proportioning system with real-time, high precision, which can realize parameters such as concentration, flow, pressure closed loop control, meet the semiconductor manufacturing process of wet process equipment such as grinding fluid supply demand, convenient operation and maintenance, high reliability, safety and low maintenance cost, flexible configuration, etc.
Customized modular design and flexible configuration
Convenient operation and maintenance
Real-time and high-precision online chemical propartianing control,closed-loop control of parameters including chemical flow and pressure
High reliability and security,low maintenance cost