HCDS series chemical supply system, adopting modular design, customization, flexible configuration, online proportioning system with real-time, high precision, which can realize closed loop control parameters, meet the wet process equipment in the process of semiconductor manufacturing chemicals such as cleaning fluid supply demand, convenient operation and maintenance, high reliability, safety and low maintenance cost, flexible configuration, etc.
Customized modular design and flexible configuration
Convenient operation and maintenance
Real-time and high-precision online chemical propartianing control,closed-loop control of parameters including chemical flow and pressure
High reliability and security,low maintenance cost