iPUMA-LT is a 12-inch cold ion implanter developed from a mature high current implanter by Hwatsing, under the requirements of mature device technologies. The implanter is equipped with cryogenic operating module, temperature detection unit and temperature warm-up module to meet the demands of mature process technologies.
Domestically developed cold implantation platform
Cold E-chuck - Real-time temperature control
Dual warm-up design - Fully warm up wafers to prevent defects
Meeting the technical requirement for the mature process