The Master-P510APEX polishing equipment is a high-precision polishing device for panel-level products in fields such as advanced packaging and glass substrates, specifically designed to meet the ultra-planarization and low-defect polishing requirements of 510mm×515mm panels. Equipped with dual polishing heads and dual grinding plates, it integrates an online cleaning module, a fully automatic loading/unloading system and a flipping module to fulfill double-side polishing needs. Capable of continuous and stable operation, it meets the requirements of fully automated mass production.
Multi-zone polishing head
Multiple advanced endpoint detection technology integrated
Dry-in and dry-out
Fully-automatic loading and unloading system
Equipped with a product flipping module, it enables double-side polishing.
Satisfied for automated mass production